Bulk mismatch values of heterostructures as determined from convergent beam electron diffraction on thin cross sections

High order Laue zone lines present in the central disk of convergent beam electron diffraction patterns have been used to determine the bulk mismatch in thinned, cross-sectioned heterostructures, where a relaxation occurs along the thinning direction. The position of these lines is sensitive to lattice parameters along different crystallographic directions, so that information on the residual strain along the growth and the thinning directions can be extracted from a single diffraction pattern. This information has been properly combined using the isotropic elasticity theory to give the bulk mismatch. The results are in good agreement with independently obtained bulk measurements.