A fast technique for the quantitative analysis of channeling RBS spectra

A straightforward method for the analysis of channeling RBS spectra is developed and validated. This method needs a minimum of computational complexity and does not require the a priori knowledge of the location of the scattering centres and of their dechanneling cross section. The method is applied to channeling RBS spectra obtained along the [100] direction in a hydrogen-implanted (100) silicon crystal to verify that the evaluated displaced-atom depth distribution is independent of the probe energy.