Structure, phase composition and microhardness of vacuum-arc multilayered Ti/Al, Ti/Cu, Ti/Fe, Ti/Zr nano-structures with different periods

The microstructure, phase composition and microhardness of multilayered Ti/Al, Ti/Cu, Ti/Fe and Ti/Zr condensates produced on stainless steel substrates via vacuum-arc evaporation of pure metals were studied. The sublayer periods (Λ) were regulated in the range 80–850 nm by varying the vacuum discharge current and the duration of the successive depositions of metallic plasma onto the substrates while maintaining the total deposition time constant. The regularity of the obtained nanostructures was investigated by scanning and transmission electron microscopy while phase compositions were identified with X-ray diffraction (XRD) analysis in order to evidence the presence of interdiffusion and the amount of intermetallics. Condensates cross sections were mechanically characterized by means of microhardness tests. Measurements were correlated to the periods and to the presence of intermetallics.