Degradation mechanisms in insulating films on Silicon

Chapter
Publication Date:
1989
Short description:
Degradation mechanisms in insulating films on Silicon / G., B., Fantini, F. - In: Microlelectronic reliability, volume II, Integrity Assessment and Assurance / E. POLLINO. - STAMPA. - NORWOOD, MA : Artech House, 1989. - ISBN 0890063508. - pp. 47-82
abstract:
Introduction. Conduction mechanisms in thin oxides. Instabilities due to contamination.
Iris type:
Capitolo/Saggio
Keywords:
Reliability. Silicon dioxide. MOSFET.
List of contributors:
Handle:
https://iris.unimore.it/handle/11380/461528
Book title:
Microlelectronic reliability, volume II, Integrity Assessment and Assurance