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  1. Research Outputs

Plasma generator

Patent
Short description:
Plasma generator / Veronesi, Paolo; Leonelli, Cristina; M., Garuti.
abstract:
A plasma generator (1) comprising a main duct (10) for a gas to be ionised (20), a waveguide (50) for electromagnetic radiation (30), and at least one supporting element (60) on which the waveguide (50) and main duct (10) are mounted; a first portion (51) of the waveguide (50) extends transversely of the supporting element (60) in a first region (61a) facing a first surface (61) of the supporting element. A second portion (52) of the waveguide (50) intersects the duct (10) for interaction between the gas (20) and the radiation (30) and for plasma generation (40); the duct (10) expends transversely of the supporting element (60) in the first region (61a).
Iris type:
Brevetto
Keywords:
microwave; plasma; source; PVD/CVD
List of contributors:
Veronesi, Paolo; Leonelli, Cristina; M., Garuti
Authors of the University:
LEONELLI Cristina
VERONESI Paolo
Handle:
https://iris.unimore.it/handle/11380/467693
  • Overview

Overview

URL

http://v3.espacenet.com/publicationDetails/biblio?KC=A1&date=20061102&NR=1718135A1&DB=EPODOC&locale=en_EP&CC=EP&FT=D
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