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  1. Research Outputs

Hemt device having an improved gate structure and manufacturing process thereof

Patent
Publication Date:
2024
Short description:
Hemt device having an improved gate structure and manufacturing process thereof / Iucolano, Ferdinando; Chini, Alessandro; Eloisa Castagna, Maria; Constant, Aurore; Tringali, Cristina.
abstract:
The HEMT device (20) has a body (22) including a heterostructure (25) configured to generate a 2-dimensional charge-carrier gas (30, 49); and a gate structure (33) which extends on a top surface (22A) of the body and is biasable to electrically control the 2-dimensional charge-carrier gas. The gate structure has a channel modulating region (40) of semiconductor material; a functional region (41) of semiconductor material; and a gate contact region (42) of conductive material. The functional region and the gate contact region extend on a top surface (40A) of the channel modulating region and the gate contact region is arranged laterally with respect to the functional region. The channel modulating region (40) has a different conductivity type with respect to the functional region (41).
Iris type:
Brevetto
List of contributors:
Iucolano, Ferdinando; Chini, Alessandro; Eloisa Castagna, Maria; Constant, Aurore; Tringali, Cristina
Authors of the University:
CHINI Alessandro
Handle:
https://iris.unimore.it/handle/11380/1400047
Full Text:
https://iris.unimore.it//retrieve/handle/11380/1400047/961101/EP4439677A1.pdf
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