Influence of experimental parameters on the determination of tetragonal distortion in heterostructures by LACBED
Articolo
Data di Pubblicazione:
1995
Citazione:
Influence of experimental parameters on the determination of tetragonal distortion in heterostructures by LACBED / Armigliato, A; Balboni, R; Corticelli, F; Frabboni, Stefano. - In: MICROSCOPY MICROANALYSIS MICROSTRUCTURES. - ISSN 1154-2799. - STAMPA. - 6:(1995), pp. 449-456. [10.1051/mmm:1995135]
Abstract:
The LACBED technique has been applied to the determination of the tetragonal distortion in Si1-xGex/Si heterostructures, which are of great interest in the device technology. The strain determination has been performed on plan sections in an analytical electron microscope. The agreement between this strain value and the tetragonal distortion is influenced mainly by the local sample flatness and the acceleration voltage.
Tipologia CRIS:
Articolo su rivista
Keywords:
Convergent beam electron diffraction; strain measurements; transmission electron microscopy
Elenco autori:
Armigliato, A; Balboni, R; Corticelli, F; Frabboni, Stefano
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