AlN-based MEMS devices for vibrational energy harvesting applications
Contributo in Atti di convegno
Data di Pubblicazione:
2011
Citazione:
AlN-based MEMS devices for vibrational energy harvesting applications / Bertacchini, Alessandro; Scorcioni, Stefano; Dondi, Denis; Larcher, Luca; Pavan, Paolo; M. T., Todaro; A., Campa; G., Caretto; S., Petroni; A., Passaseo; M., De Vittorio. - STAMPA. - (2011), pp. 119-122. ( 41st European Solid-State Device Research Conference, ESSDERC 2011 Helsinki, fin September, 12-16, 2011) [10.1109/ESSDERC.2011.6044220].
Abstract:
This paper presents a new AlN-based MEMS devices suitable for vibrational energy harvesting applications. Due to their particular shape and unlike traditional cantilever which efficiently harvest energy only if subjected to stimulus in the proper direction, the proposed devices have 3D generation capabilities solving the problem of device orientation and placement in real applications. Thanks to their particular shape, the realized devices present more than one fundamental resonance frequencies in a range comprised between 500 Hz and 1.5 kHz, with a voltage generation higher than 300μV and an output power up to 0.4 pW for single MEMS device.
Tipologia CRIS:
Relazione in Atti di Convegno
Keywords:
MEMS; AlN; Vibrational Energy Harvesting
Elenco autori:
Bertacchini, Alessandro; Scorcioni, Stefano; Dondi, Denis; Larcher, Luca; Pavan, Paolo; M. T., Todaro; A., Campa; G., Caretto; S., Petroni; A., Passaseo; M., De Vittorio
Link alla scheda completa:
Titolo del libro:
Proceedings of the 41st European Solid-State Device Research Conference (ESSDERC)
Pubblicato in: