Low Field Electron and Hole Mobility of SOI Transistors Fabricated on Ultra-Thin Silicon Films for Deep Sub-Micron Technology Application
Articolo
Data di Pubblicazione:
2001
Citazione:
Low Field Electron and Hole Mobility of SOI Transistors Fabricated on Ultra-Thin Silicon Films for Deep Sub-Micron Technology Application / Esseni, David; Mastrapasqua, M.; Celler, G.; Fiegna, C.; Selmi, Luca. - In: IEEE TRANSACTIONS ON ELECTRON DEVICES. - ISSN 0018-9383. - 48:12(2001), pp. 2842-2850. [10.1109/16.974714]
Tipologia CRIS:
Articolo su rivista
Keywords:
Mobility; SOI MOSFETs; SOI performance; Ultrathin silicon films;
Elenco autori:
Esseni, David; Mastrapasqua, M.; Celler, G.; Fiegna, C.; Selmi, Luca
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