The thermally balanced bridge technique (TBBT): a new high resolution resistometric measurement technique for the study of electromigration-induced early resistance changes in metal stripes
Articolo
Data di Pubblicazione:
1997
Citazione:
The thermally balanced bridge technique (TBBT): a new high resolution resistometric measurement technique for the study of electromigration-induced early resistance changes in metal stripes / J., Van Olmen; W., De Ceuninck; L., De Schepper; A., Goldoni; A., Cervini; Fantini, Fausto. - In: MICROELECTRONICS RELIABILITY. - ISSN 0026-2714. - STAMPA. - 37:(1997), pp. 1483-1486. [10.1016/S0026-2714(97)00091-5]
Abstract:
A new high resolution resistometric measurement technique has been developed in order to perform accurate early resistance change measurements on metal lines submitted to high current densities.
Tipologia CRIS:
Articolo su rivista
Keywords:
Electromigration.
Resistometric measurement.
Elenco autori:
J., Van Olmen; W., De Ceuninck; L., De Schepper; A., Goldoni; A., Cervini; Fantini, Fausto
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