Fabrication of single or multiple gate field plates

Brevetto
Data di Pubblicazione:
2013
Citazione:
Fabrication of single or multiple gate field plates / Chini, Alessandro; Mishra, Umesh K.; Parikh, Primit; Wu, Yifeng. - (2013 Mar 15).
Abstract:
"This invention relates to semiconductor devices, and more particularly, to the fabrication of single or
multiple gate field plates."
Tipologia CRIS:
Brevetto
Keywords:
HEMT, Power FET, WBG Semiconductors
Elenco autori:
Autori di Ateneo:
Link alla scheda completa:
https://iris.unimore.it/handle/11380/1199952
Link al Full Text: