Fabrication of single or multiple gate field plates

Patent
Publication Date:
2013
Short description:
Fabrication of single or multiple gate field plates / Chini, Alessandro; Mishra, Umesh K.; Parikh, Primit; Wu, Yifeng. - (2013 Mar 15).
abstract:
"This invention relates to semiconductor devices, and more particularly, to the fabrication of single or
multiple gate field plates."
Iris type:
Brevetto
Keywords:
HEMT, Power FET, WBG Semiconductors
List of contributors:
Authors of the University:
Handle:
https://iris.unimore.it/handle/11380/1199952
Full Text: