Data di Pubblicazione:
2020
Citazione:
Hemt transistor including field plate regions and manufacturing process thereof / Iucolano, Ferdinando; Chini, Alessandro. - (2020 Dec 02).
Abstract:
HEMT transistor (50; 100; 150) having a semiconductor body (52) forming a semiconductive heterostructure (54, 56); a gate region (60), of conductive material, arranged above and in contact with the semiconductor body (52); a first insulating layer (58) extending above the semiconductor body, laterally to the conductive gate region (60); a second insulating layer (62) extending above the first insulating layer (58) and the gate region (60); a first field plate region (84), of conductive material, extending between the first and the second insulating layers (58), laterally spaced from the conductive gate region (60); and a second field plate region (85), of conductive material, extending above the second insulating layer (62), vertically aligned with the first field plate region (84).
Tipologia CRIS:
Brevetto
Keywords:
HEMT, Power FET, WBG Semiconductors
Elenco autori:
Iucolano, Ferdinando; Chini, Alessandro
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